EUV Lithography Short Course
Our EUV Lithography Short Course will be held online only on Sunday, June 22nd, 2025 from 8:30 AM - 4:30 AM (US Eastern Time Zone). This course provides attendees with a full overview of the fundamentals, status, and technical challenges of EUV Lithography. For a detailed course description, please visit our website at www.euvlitho.com/education.
The course will be taught by Dr. Vivek Bakshi (EUV Litho, Inc.), Dr. Patrick Naulleau (EUV Tech), Dr. Sangsul Lee (POSTECH University) and Dr. Jan van Schoot (ASML). Participants will receive a copy of E-Text of EUV Lithography, Second Edition, from SPIE Press.
Short Courses and the Source Workshop require separate registrations. To register for the workshops and short courses, please visit our registration page at www.euvlitho.com/shop. This is an early registration fee for short course and after May 2, 2025, the registration fee will increase by $ 100.
Additional registration information regarding registration, sponsorships, workshop agenda, presenters, etc., is available on our website, www.euvlitho.com.
If you have any outlying questions or concerns, please direct them to our administrative team at [email protected].
Registration for EUV Lithography Short Course - Regular
Registration for EUV Lithography Short Course - Full time Student
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