EUV & Soft X-Ray Sources - Short Course
Our EUV & Soft X-Ray Sources Short Course will be held online only on Sunday, June 21, 2025 from 8:30 PM - 4:30 PM (US Eastern Time Zone). This course will give an overview of the underlying physics associated with EUV and Soft X-ray sources. This short course will be taught by Prof. Gerry O’Sullivan (UC Dublin), Prof. Ladislav Pina (Czech Technical University in Prague), Dr. Henry Kapteyn (KMLabs and University of Colorado at Boulder) and Dr. Dinh Nguyen (xLight). Participants will receive a EText copy of Photon Sources for Lithography and Metrology from SPIE Press. A detailed course outline is available at www.euvlitho.com/education.
This is an early registration rate and the registration fee will increase by $ 100 after May 2, 2025. Short Courses and the Workshop require separate registration; to register for the 2025 EUVL and Source Workshop, please visit www.euvlitho.com/shop.
Additional registration information regarding registration, sponsorships, workshop agenda, presenters, etc., is available on our website, www.euvlitho.com.
If you have any outlying questions or concerns, please direct them to our administrative team at [email protected].
Registration for all attendees and speakers.
Registration for full-time students.
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