2025 EUVL and Source Workshop Proceedings

We are happy to announce the publication of the proceedings for the 2025 EUVL and Source Workshop (June 23-26, 2025).

The proceedings include links to presentations, all of which are downloadable. Please email [email protected] if you have any trouble accessing the files.

A link to the proceedings will be included in the confirmation email you receive after completing registration on this page.

Workshop Proceedings*

2025 EUVL and Source Workshop ($150.00)
Includes links to downloadable PDFs of presenters' slides.
Department License ($450.00)
Will provide a license for downloading and sharing the proceeding within the buyer's department with no more than 50 people. For permission to share within a larger department, please contact [email protected] for a price.

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$150.00

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