EUV Lithography Short Course

Our EUV Lithography Short Course will be held online only on Saturday, October 19th, 2024 from 2:00 pm - 8:00 pm (CET - Amsterdam Time). This course provides attendees with a full overview of the fundamentals, status, and technical challenges of EUV Lithography. For a detailed course description, please visit our website at www.euvlitho.com/education.

The course will be taught by Dr. Vivek Bakshi (EUV Litho, Inc.), Dr. Patrick Naulleau (EUV Tech), Dr. Sangsul Lee (POSTECH University) and Dr. Jan van Schoot (ASML). Participants will receive a copy of EUV Lithography, Second Edition.

Short Courses and the Source Workshop require separate registrations. To register for the workshops and short courses, please visit our registration page at www.euvlitho.com/shop.

Additional registration information regarding registration, sponsorships, workshop agenda, presenters, etc., is available on our website, www.euvlitho.com.

If you have any outlying questions or concerns, please direct them to our administrative team at [email protected].

  • Registration for EUV Lithography Short Course - Regular

  • Registration for EUV Lithography Short Course - Full time Student


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