2024 EUVL Short Course

Introduction to EUV Lithography - EUV Lithography Short Course

Our EUV Lithography Short Course will be held in an hybrid format (online and in person) on Monday, June 3, 2024 from 8:30 a.m. - 5:00 p.m. (PDT), in Berkeley, CA. This course provides attendees with a full overview of the fundamentals, status, and technical challenges of EUV Lithography. The course will be taught by Dr. Vivek Bakshi (EUV Litho, Inc.), Dr. Patrick Naulleau (EUV Tech), Dr. Sangsul Lee (POSTECH University) and Dr. Jan van Schoot (ASML). Participants will receive a copy of EUV Lithography, Second Edition. A detailed course description is available here.

Short Courses and the Workshop require separate registration; to register for the 2024 EUVL Workshop and Supplier Showcase, visit our registration page. Register now! Early registration will end May 10th and prices will increase by $ 100.

Additional registration information regarding registration, sponsorships, workshop agenda, presenters, etc., is available on our website, www.euvlitho.com.

If you have any outlying questions or concerns, please direct them to our administrative team at [email protected].

Registration Options (Choose Add Registrant option to add multiple items or attendees.)*

Early EUV Lithography Short Course Registration - Attendees/Speakers ($450.00)
Registration for all attendees and speakers.
Early EUV Lithography Short Course Registration - Student ($250.00)
EUV Lithography Short Course Registration - Student

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