2024 EUV and Soft X-Ray Sources Short Course

EUV & Soft X-Ray Sources - Short Course

Our EUV & Soft X-Ray Sources Short Course will be held online only on Sunday, June 2nd, 2024 from 8:30 a.m. - 5:00 p.m. (PDT). This course will give an overview of the underlying physics associated with EUV and Soft X-ray sources. This short course will be taught by Prof. Gerry O’Sullivan (UC Dublin), Prof. Bjorn Manuel Hegelich (UT Austin and Tau Systems). Dr. Henry Kapteyn (K&M Labs and University of Colorado) and Prof. Marcelo Ackermann (University of Twente). Participants will receive a copy of Photon Sources for Lithography and Metrology. A detailed course outline is available here.

Short Courses and the Workshop require separate registration; to register for the 2024 EUVL Workshop and Supplier Showcase, visit our registration page.

Additional registration information regarding registration, sponsorships, workshop agenda, presenters, etc., is available on our website, www.euvlitho.com.

If you have any outlying questions or concerns, please direct them to our administrative team at [email protected].

Registration Options (Choose Add Registrant option to add multiple items or attendees.)*

Early Source Short Course Registration - Attendees/Speakers ($450.00)
Early registration for all attendees and speakers.
Early Source Short Course Registration - Student ($250.00)
Early registration for students.

Name*

Email*

Country*

Company / Organization / School*

Phone Number

Total

$0.00

Billing Information

Name*

Credit Card*

Visa
Mastercard
American Express
Discover

ZIP/Postal Code*

Email*

This page is secured with 256 bit encryption

Event Registration Software by RegFox