We at EUV Litho are happy to announce the publication of proceedings for the 2020 Source Workshop. The proceedings include links to presentations and recordings of the live meeting. 

PDFs of PowerPoints are downloadable, but recordings of the sessions will be available for viewing only. Please email [email protected] if you have any trouble accessing the files.

A link to the proceedings will be included in the confirmation email you receive after completing registration on this page.

  • Includes links to recorded sessions and downloadable PDFs of presenters' slides.

  • Will provide a license for downloading and sharing the proceeding within the buyer's department with no more than 50 people. For permission to share within a larger department, please contact [email protected] for a price.


$125.00


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